@article{article, title = {{Energy filtered imaging in a FEG-SEM for enhanced dopant contrast}}, publisher = {{Cambridge University Press (CUP)}}, url = {{}}, year = {{2002}}, month = {{8}}, author = {{Schönjahn C and Humphreys CJ and Glick M}}, doi = {{10.1017/s1431927602106222}}, volume = {{8}}, journal = {{Microscopy and Microanalysis}}, issue = {{S02}}, pages = {{718-719}}, note = {{Accessed on 2024/12/21}}}