@article{article, title = {{Nanopatterning by ion implantation through nanoporous alumina masks.}}, url = {{}}, year = {{2013}}, month = {{2}}, author = {{Guan W and Ross IM and Bhatta UM and Ghatak J and Peng N and Inkson BJ and Möbus G}}, doi = {{10.1039/c3cp50196e}}, volume = {{15}}, journal = {{Phys Chem Chem Phys}}, issue = {{12}}, pages = {{4291-4296}}, note = {{Accessed on 2025/03/11}}}