@inproceedings{inproceedings, title  = {{High resolution ELNES characterization of chemical bonding in low-dielectric constant materials for interconncet isolation}},

 url = {{}},

 year = {{2005}},

 month = {{1}},

 author = {{Stegmann H and Walther T and Quandt E and Zschech E and Schmeisser D}},

 pages = {{238-238}},

 note = {{Accessed on 2024/10/23}}}