TY  - CONF

T1  - High resolution ELNES characterization of chemical bonding in low-dielectric constant materials for interconncet isolation

PY  - 2005/01/01

AU  - Stegmann H

AU  - Walther T

AU  - Quandt E

AU  - Zschech E

AU  - Schmeisser D

ED  - 

SP  - 238

EP  - 238

Y2  - 2024/10/23

ER  -